PRECISE POSITIONING OF DIAMAGNETICALLY LEVITATED MICROROBOT
نویسندگان
چکیده
منابع مشابه
A High-Precision, Magnetically Levitated Positioning Stage
High accuracy positioning stages with multiple degrees-of-freedom, or microsteppers, are ubiquitous in industrial manufacturing. These devices are used in probing and inspection systems, in the assembly of disk drive heads, and in semiconductor manufacturing. In semiconductor manufacturing, microsteppers are employed to accurately move silicon wafers in the photolithography process. To guarante...
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ژورنال
عنوان ژورنال: CBU International Conference Proceedings
سال: 2017
ISSN: 1805-9961,1805-997X
DOI: 10.12955/cbup.v5.1073